Equipment Front End Module EFEM modules

Equipment Front End Module EFEM
Equipment Front End Module EFEM
Equipment Front End Module EFEM

The EFEM (Equipment Front End Module) is a class 1 mini-environment system designed to maximize productivity of semiconductor processing equipment tools that require the highest level of automation. The Load Port is modular and can seamlessly integrate to the OEM process tools. Milara EFEMs can be customized to meet the automation requirements of any semiconductor manufacturing facility, adding stations such as pre-aligners and OCR. Capable of handling various wafer sizes with 1-4 load ports or custom cassette holders. Milara’s Process and EFEM modules are built to customer specification to meet specific system and layout requirements.

  • Integrated design for easy setup and installation
  • Speeding tool qualification
  • Excellent structural rigidity
  • Highly customizable design
  • SEMI BOLTS interface
  • Class 1 clean-room environment compatibility
  • Fully compliant with SEMI standards
  • Front mount access for fast and easy serviceability
  • Support for 200mm and 300mm wafers
  • 2,3 and 4 Load Port configuration
  • Milara Diamond H3 & H4 Robots
  • Process independent modular design
  • Recipe driven Diamond Commander Software
  • Optional SECS/GEM interface
  • Monitor and Keyboard on Ergotron Arm
  • Full line of Wafer Aligners and Mapping Sensors
  • Light tower Reliability – MTBF > 60,000 hours, (MCBF >10,000,000